Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

At-wavelength inspection of sub- 40 nm defects in extreme ultraviolet lithography mask blank by photoemission electron microscopy

Not Accessible

Your library or personal account may give you access

Abstract

A new at-wavelength inspection technology to probe nanoscale defects buried underneath MoSi multilayers on an extreme ultraviolet (EUV) lithography mask blank has been implemented using EUV photoemission electron microscopy (EUV-PEEM). EUV-PEEM images of programmed defect structures of various lateral and vertical sizes recorded at an 13.5nm wavelength show that 35nm wide and 4nm high buried line defects are clearly detectable. The imaging technique proves to be sensitive to small phase jumps, enhancing the edge visibility of the phase defects, which is explained in terms of a standing wave enhanced image contrast at resonant EUV illumination.

© 2007 Optical Society of America

Full Article  |  PDF Article
More Like This
Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy

Jingquan Lin, Nils Weber, Matthias Escher, Jochen Maul, Hak-Seung Han, Michael Merkel, Stefan Wurm, Gerd Schönhense, and Ulf Kleineberg
Opt. Express 16(20) 15343-15352 (2008)

Actinic microscope for extreme ultraviolet lithography photomask inspection and review

Michael Goldstein and Patrick Naulleau
Opt. Express 20(14) 15752-15768 (2012)

Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination

F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni
Opt. Lett. 34(3) 271-273 (2009)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved