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Subpicosecond KrF* excimer-laser source

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Abstract

A subpicosecond KrF* laser system capable of producing 20 ± 2-mJ pulses has been developed. The means of producing ultrashort seed pulses for the KrF* amplifier system and characteristics of the full system are described. It is shown that efficient subpicosecond energy extraction is possible.

© 1986 Optical Society of America

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