Abstract
A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a λ/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 μm for displacement and 100 μm for distance are obtained over a range of a few meters.
© 1987 Optical Society of America
Full Article | PDF ArticleMore Like This
Toshihiko Yoshino, M. Nara, Sergay Mnatzakanian, Byron S. Lee, and Timothy C. Strand
Appl. Opt. 26(5) 892-897 (1987)
Sanjib Chatterjee and Y. Pavan Kumar
Appl. Opt. 54(33) 9839-9843 (2015)
E. Gelmini, U. Minoni, and F. Docchio
Opt. Lett. 19(3) 213-215 (1994)