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Development of a Schwarzschild-type x-ray microscope

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Abstract

A Schwarzschild-type x-ray microscope has been designed, constructed, and tested. Ni/C multilayers were used as the x-ray mirrors, with a thickness (2d) of 7 nm and 30 layer pairs. The microscope has attained a spatial resolution of 0.5 μm at a magnification of 15. By using bright laser-produced plasmas as an x-ray source [R. Kodama, K. Okada, N. Ikeda, M. Mineo, K. A. Tanaka, T. Mochizuki, and C. Yamanaka, J. Appl. Phys. 59, 3050 (1986)], images could be recorded during the 400-psec laser pulse.

© 1991 Optical Society of America

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