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Efficient generation of subpicosecond seed pulses at 193 nm for amplification in ArF gain modules by frequency mixing in nonlinear optical crystals

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Abstract

Phase-matched sequential frequency mixing in three β-barium borate crystals was used for efficient generation of subpicosecond UV pulses tunable at approximately 193 nm. Double-pass amplification of these seed pulses in a conventional ArF excimer gain module resulted in 800-fs, 1.5-mJ optical pulses.

© 1992 Optical Society of America

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