Abstract

We made a high-efficiency reflection grating by coating a nine-layer quarter-wave system of ZnS/Na₃AlF₆ directly onto a surface-relief grating in photoresist. Efficiencies of 70% and 84% were measured at the first-order Littrow mount with the laser beam incident from the air side and from the substrate side, respectively. The experimental results are in qualitative agreement with theoretical predictions. The key to further improvement in the diffraction efficiency is to improve the contour conformation of the coated dielectric layers.

© 1995 Optical Society of America

High-efficiency multilayer dielectric diffraction gratings

M. D. Perry, R. D. Boyd, J. A. Britten, D. Decker, B. W. Shore, C. Shannon, and E. Shults
Opt. Lett. 20(8) 940-942 (1995)

All-dielectric reflection gratings: a study of the physical mechanism for achieving high efficiency

Hongbo Wei and Lifeng Li
Appl. Opt. 42(31) 6255-6260 (2003)

High-efficiency metallic diffraction gratings for laser applications

R. D. Boyd, J. A. Britten, D. E. Decker, B. W. Shore, B. C. Stuart, M. D. Perry, and Lifeng Li
Appl. Opt. 34(10) 1697-1706 (1995)

Design of high-efficiency dielectric reflection gratings

B. W. Shore, M. D. Perry, J. A. Britten, R. D. Boyd, M. D. Feit, H. T. Nguyen, R. Chow, G. E. Loomis, and Lifeng Li
J. Opt. Soc. Am. A 14(5) 1124-1136 (1997)

High-efficiency dielectric reflection gratings: design, fabrication, and analysis

Karl Hehl, Joerg Bischoff, Ullrich Mohaupt, Martin Palme, Bernd Schnabel, Lutz Wenke, Ragnar Bödefeld, Wolfgang Theobald, Eberhard Welsch, Roland Sauerbrey, and Hartmut Heyer
Appl. Opt. 38(30) 6257-6271 (1999)