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Real-time reflectivity and topography imagery of depth-resolved microscopic surfaces

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Abstract

We have constructed an interference microscope that produces, in real time, reflectivity and topography images of surfaces with depth discrimination better than 1 μm. Intensity and phase images are obtained at the rate of 50 per second by use of a multiplexed lock-in detection and MMX assembler-optimized calculation routines. With a wavelength of 0.84 μm, depth discrimination of 0.7 μm and lateral resolution of 0.3 μm were demonstrated, in good agreement with theory. Two-dimensional cross-sectional reflectivity and topography images taken at different depths in an integrated circuit are presented.

© 1999 Optical Society of America

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