Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors

Not Accessible

Your library or personal account may give you access

Abstract

Rib microwaveguides are demonstrated on silicon-on-insulator substrates with Si film thickness of either 380 or 200 nm and a width of 1 µm. Corner mirrors that allow compact 90° turns between two perpendicular waveguides are characterized. Measured propagation losses are 0.4 dB/cm and 0.5 dB/cm for 380-nm and 200-nm Si film, respectively, and mirror losses are 1 dB. This allows the development of applications such as optical interconnects in integrated circuits over propagation distances larger than several centimeters.

© 2003 Optical Society of America

Full Article  |  PDF Article
More Like This
Ultracompact splitter for submicrometer silicon-on-insulator rib waveguides

Alain Koster, Eric Cassan, Suzanne Laval, Laurent Vivien, and Daniel Pascal
J. Opt. Soc. Am. A 21(11) 2180-2185 (2004)

Compact and low loss silicon-on-insulator rib waveguide 90° bend

Yusheng Qian, Seunghyun Kim, Jiguo Song, Gregory P. Nordin, and Jianhua Jiang
Opt. Express 14(13) 6020-6028 (2006)

Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls

Po Shan Chan, H. K. Tsang, and C. Shu
Opt. Lett. 28(21) 2109-2111 (2003)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved