Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Femtosecond laser pulses for surface-profile metrology

Not Accessible

Your library or personal account may give you access

Abstract

We discuss two ways to use femtosecond pulsed lasers as a new interferometric light source for enhanced precision surface-profile metrology. First, a train of ultrafast laser pulses yields repeated low temporal coherence, which allows unequal-path scanning interferometry, which is not feasible with white light, to be performed. Second, the high spatial coherence of femtosecond pulsed lasers enables large-sized optics to be tested in nonsymmetric configurations with relatively small-sized reference surfaces. These two advantages are verified experimentally with Fizeau and Twyman–Green type scanning interferometers.

© 2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Large-field step-structure surface measurement using a femtosecond laser

Yue Wang, Guangyao Xu, Shilin Xiong, and Guanhao Wu
Opt. Express 28(15) 22946-22961 (2020)

3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser

Yang Lu, Jiyong Park, Liandong Yu, and Seung-Woo Kim
Appl. Opt. 57(10) 2584-2589 (2018)

Femtosecond laser pulses for fast 3-D surface profilometry of microelectronic step-structures

Woo-Deok Joo, Seungman Kim, Jiyong Park, Keunwoo Lee, Joohyung Lee, Seungchul Kim, Young-Jin Kim, and Seung-Woo Kim
Opt. Express 21(13) 15323-15334 (2013)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved