Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Damage and ablation of large bandgap dielectrics induced by a 46.9 nm laser beam

Not Accessible

Your library or personal account may give you access

Abstract

We applied a 0.3 mJ, 1.7 ns, 46.9 nm soft-x-ray argon laser to ablate the surface of large bandgap dielectrics: CaF2 and LiF crystals. We studied the ablation versus the fluence of the soft-x-ray beam, varying the fluence in the range 0.053Jcm2. Ablation thresholds of 0.06 and 0.1Jcm2 and ablation depths of 14 and 20 nm were found for CaF2 and LiF, respectively. These results define new ablation conditions for these large bandgap dielectrics that can be of interest for the fine processing of these materials.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses

M. Grisham, G. Vaschenko, C. S. Menoni, J. J. Rocca, Yu. P. Pershyn, E. N. Zubarev, D. L. Voronov, V. A. Sevryukova, V. V. Kondratenko, A. V. Vinogradov, and I. A. Artioukov
Opt. Lett. 29(6) 620-622 (2004)

Indium tin oxide ultrafast laser lift-off ablation mechanisms and damage minimization

Goran Erik Hallum, Dorian Kürschner, Constanze Eulenkamp, Ramon Auer, Bastian Hartmann, Wolfgang Schulz, and Heinz Paul Huber
Opt. Express 31(26) 43017-43034 (2023)

Si and Cu ablation with a 46.9-nm laser focused by a toroidal mirror

Yongpeng Zhao, Huaiyu Cui, Wenhong Zhang, Wei Li, Shan Jiang, and Lianbo Li
Opt. Express 23(11) 14126-14134 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved