Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

© 2006 Optical Society of America

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