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Sub- 38 nm resolution tabletop microscopy with 13 nm wavelength laser light

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Abstract

We have acquired images with a spatial resolution better than 38nm by using a tabletop microscope that combines 13nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 1520nm spatial resolution and a picosecond time resolution.

© 2006 Optical Society of America

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