Abstract
We present the design, fabrication, and measurement of an ultracompact directional coupler in . By utilizing the lag effect in the dry etching process, in one etch step, deeply etched asymmetric waveguides with a shallow groove in between are fabricated. This special property enhances the coupling efficiency for the directional coupler and thus makes the device ultracompact. We demonstrate directional couplers as short as , which is only the length of the conventional design.
© 2008 Optical Society of America
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