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Multiwavelength interferometry: extended range metrology

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Abstract

We present an optimized method for multiwavelength interferometry that allows measurements beyond the largest beat wavelength. The approach exploits wavelength coincidence between two beat wavelengths in order to measure unambiguously over an extended range. Performance of the approach has been validated both through simulations and experimentally by means of a fiber interferometer for four measurement wavelengths. Initial results have demonstrated 1200th of a fringe phase resolution, giving absolute metrology over 18.16mm, or a dynamic range of 1 part in 2.4×106. With improved phase resolution the method has the potential to range over >100m using femtosecond laser frequency comb sources.

© 2009 Optical Society of America

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