Abstract

We describe a simple and convenient method of controlling the profile of a blazed grating that consists of using a patterned native-oxide layer of off-cut silicon (111) wafers as the mask of anisotropic etching to maximize the smooth blaze facets of the desired blaze angle and to minimize the deficiencies of the groove apexes. With the blazed-grating profile well controlled by this technique, a $1200\mathrm{g}∕\mathrm{mm}$ blazed grating was fabricated that had a blaze angle of 5.0° and smooth blaze facets of about $0.2\mathrm{nm}$ rms. It was measured to have blaze efficiency in the vacuum–ultraviolet wavelength region.

© 2009 Optical Society of America

Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask

Hui Lin and Lifeng Li
Appl. Opt. 47(33) 6212-6218 (2008)

Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

Michael P. Kowalski, Ralf K. Heilmann, Mark L. Schattenburg, Chih-Hao Chang, Frederick B. Berendse, and William R. Hunter
Appl. Opt. 45(8) 1676-1679 (2006)

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

Dmitriy L. Voronov, Minseung Ahn, Erik H. Anderson, Rossana Cambie, Chih-Hao Chang, Eric M. Gullikson, Ralf K. Heilmann, Farhad Salmassi, Mark L. Schattenburg, Tony Warwick, Valeriy V. Yashchuk, Lucas Zipp, and Howard A. Padmore
Opt. Lett. 35(15) 2615-2617 (2010)

High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

Hui Lin, Lichao Zhang, Lifeng Li, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
Opt. Lett. 33(5) 485-487 (2008)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)