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Efficient broadband silicon-on-insulator grating coupler with low backreflection

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Abstract

We design and fabricate an efficient broadband grating coupler on a 400nm thick silicon-on-insulator wafer. The measured coupling loss is 3dB when coupling to a single-mode fiber at 1310nm wavelength with TE polarization. The spectral FWHM and backreflection are determined to be 58nm and 27dB, respectively.

© 2011 Optical Society of America

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