Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

Not Accessible

Your library or personal account may give you access

Abstract

Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach–Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002nm resolution without line shape degradation. Field- induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing.

© 2011 Optical Society of America

Full Article  |  PDF Article
More Like This
Femtosecond laser tuning of silicon microring resonators

Daniel Bachman, Zhijiang Chen, Ashok M. Prabhu, Robert Fedosejevs, Ying Y. Tsui, and Vien Van
Opt. Lett. 36(23) 4695-4697 (2011)

Hydrogenated amorphous silicon photonic device trimming by UV-irradiation

Timo Lipka, Melanie Kiepsch, Hoc Khiem Trieu, and Jörg Müller
Opt. Express 22(10) 12122-12132 (2014)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved