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Fabrication of a mid-IR wire-grid polarizer by direct imprinting on chalcogenide glass

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Abstract

A mid-IR wire-grid polarizer with a 500nm pitch was fabricated on a low toxic chalcogenide glass (Sb-Ge-Sn-S system) by the thermal imprinting of periodic grating followed by the thermal evaporation of Al metal. After imprinting, deposition of Al on the grating at an oblique angle produced a wire-grid polarizer. The fabricated polarizer showed polarization with TM transmittance greater than 60% at 59μm wavelengths and an extinction ratio greater than 20dB at 3.511μm wavelengths. This polarizer with a high extinction ratio can be fabricated more simply and less expensively than conventional IR polarizers.

© 2011 Optical Society of America

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