Abstract

We demonstrate a $300\mathrm{\mu m}$ long silicon photonic crystal (PC) slot waveguide device for on-chip near-infrared absorption spectroscopy, based on the Beer–Lambert law for the detection of methane gas. The device combines slow light in a PC waveguide with high electric field intensity in a low-index $90\mathrm{nm}$ wide slot, which effectively in creases the optical absorption path length. A methane concentration of $100\mathrm{ppm}$ (parts per million) in nitrogen was measured.

© 2011 Optical Society of America

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