Abstract
An optical phase modulator is presented by using micro-electro-mechanical systems to actuate deformable silicon waveguides. Via mechanically stretching the waveguide length, the optical path is extended, resulting in a phase shift. The experimental results show that a phase shift of near is achieved at for both TE- and TM-polarized waves by cascading six phase modulation units, agreeing well with the theoretical prediction. The power consumption is estimated to be smaller than at , mainly resulting from the leakage current.
© 2011 Optical Society of America
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