Abstract
A silicon on insulator (SOI)-based trapezoidal waveguide with a 45° reflector for noncoplanar optical interconnect is demonstrated. The proposed waveguide is fabricated on an orientation-defined (100) SOI substrate by using a single-step anisotropic wet-etching process. The optical performances of proposed waveguides are numerically and experimentally studied. Transmittance of , alignment tolerance of , cross talk of , and propagation loss of are achieved The proposed waveguide would be a basic element and suitable for the future intrachip optical interconnects.
©2012 Optical Society of America
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