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Evanescent field waveguide sensing with subwavelength grating structures in silicon-on-insulator

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Abstract

We explore, to the best of our knowledge, the potential of diffractionless subwavelength grating waveguides for sensing applications. We show that by subwavelength patterning of silicon-wire waveguides the field delocalization can be engineered to increase the sensitivity. Fully vectorial 3D-FDTD simulations confirm the sensitivity enhancement, achieving sensitivities of 0.83RIU/RIU and 1.5·103RIU/nm for bulk and surface sensing, respectively, which compare favorably to state-of-the-art sensing waveguides.

© 2014 Optical Society of America

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