Abstract

We report simple systematic hole-shifting rules applicable to any $\mathrm{L}x$ ($x\text{:}\mathrm{2,3},\mathrm{4,5},\dots$) nanocavity. The rules specify six sets of holes to be tuned with only two or three shift parameters. While keeping the same cavity wavelength and nearly the same mode volume, the new rule increases the $Q$ factor by nearly one order of magnitude compared with an edge-hole-shifted $\mathrm{L}x$ nanocavity. The $Q$ factor of the high-order mode is also greatly increased. This merit is obvious from the maximum experimental $Q$ factors of over 500,000 at L2 and of over 1,000,000 at L3, L4, and L5 achieved in Si photonic crystals.

© 2014 Optical Society of America

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