Abstract

We demonstrate longitudinal beam-steering with a $1\times 16$ silicon optical phased array (OPA) using a monochromatic light source and thermo-optic control of the refractive index in the grating radiator region. The refractive index is controlled by forming a series of $n\text{-}i\text{-}n$ heaters, placing $i$-regions in each radiator of the OPA. When the biased voltage in the heaters is increased, the refractive index of the radiator region is increased by the thermo-optic effect, and the longitudinal radiation angle is changed according to the Bragg condition. The transversal beam-steering is accomplished by phase control with the phase shifters, which are devised with a $p\text{-}i\text{-}n$ diode using the electro-optic effect. With these electro-optic $p\text{-}i\text{-}n$ phase shifters and $n\text{-}i\text{-}n$ thermo-optic radiators, we achieve a relatively wide 2D beam-steering in a range of 10.0°/45.4° in the longitudinal/transversal directions with a 1.55 μm light source. The tuning efficiency is 0.016°/mW in the longitudinal beam-steering.

© 2019 Optical Society of America

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