Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Vector scanning subtractive manufacturing technology for laser rapid fabrication

Not Accessible

Your library or personal account may give you access

Abstract

Herein, a vector scanning subtractive manufacturing technology is proposed to rapidly fabricate smooth micro-optical components, which is based on the vector scanning method and wet etching. Compared with the raster scanning method, the vector scanning method increases processing efficiency by nearly two orders and mitigates a buildup of stress around the laser processed region, avoiding the generation of cracks. The Letter demonstrates the fabrication of three-dimensional (3D) micro-structures with various sizes and morphologies. For example, micro-concave lenses with diameters of 20 µm to 140 µm, heights of 10 µm to 70 µm, and surface roughness of 29 nm are flexibly fabricated on sapphire by vector scanning subtractive manufacturing technology. The results indicate that the technology has broad prospects in the field of monolithic integrated 3D all-solid-state micro-optics.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Fabrication of nanogap structures through spatially shaped femtosecond laser modification with the assistance of wet chemical etching

Shipeng Zhou, Xiaowei Li, Ji Huang, Zhipeng Wang, Yang Liu, Shuai Gao, Zhijie Xu, and Lan Jiang
Opt. Lett. 46(15) 3560-3563 (2021)

Rapid fabrication of large-area concave microlens arrays on silica glasses by femtosecond laser bursts

Quanji Wang, Shaorui Yang, Zijing Yang, Jun Duan, Wei Xiong, and Leimin Deng
Opt. Lett. 47(15) 3936-3939 (2022)

High-quality rapid laser drilling of transparent hard materials

Yi-ming Lu, Yan-zhao Duan, Xue-qing Liu, Qi-dai Chen, and Hong-Bo Sun
Opt. Lett. 47(4) 921-924 (2022)

Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved