Abstract

An integrated grating circuit (IGC) for guided-beam multiple division was fabricated in an As₂S₃ film waveguide by the electron-beam direct-writing technique, and excellent optical performance was demonstrated. The circuit was composed of one chirped and three uniform-period gratings, each precisely arrayed to satisfy the Bragg condition. An incident IR guided beam (λ = 1.153 μm) was successfully divided into multiple beams by an IGC of 1.0 × 3.0 mm. Design, fabrication technique, and optical performance of the IGC for guided-beam multiple division are discussed.

© 1980 Optical Society of America

Microgratings for high-efficiency guided-beam deflection fabricated by electron-beam direct-writing techniques

Y. Handa, T. Suhara, H. Nishihara, and J. Koyama
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Direct writing of optical gratings using a scanning electron microscope

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Comparison of bending losses in integrated optical circuits

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